Fluorescence of sputtered metal atoms and filling gas atoms in argon and neon rf sputtering glow discharges.
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Fluorescence of sputtered metal atoms and filling gas atoms in argon and neon rf sputtering glow discharges.

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Published by The Finnish Academy of Technical Sciences in Helsinki .
Written in English


Book details:

Edition Notes

SeriesActa Polytechnica Scandinavica : Physics including Nucleonics Series -- No. 107
The Physical Object
Pagination37 p., ill
Number of Pages37
ID Numbers
Open LibraryOL21258973M
ISBN 109516660576

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